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E-beam exposure

См. также в других словарях:

  • ion-beam exposure — jonpluoštis eksponavimas statusas T sritis radioelektronika atitikmenys: angl. ion exposure; ion beam exposure vok. Ionenstrahlbelichtung, f rus. ионно пучковое экспонирование, n pranc. exposition par faisceau ionique, f …   Radioelektronikos terminų žodynas

  • electron-beam exposure — elektronpluoštis eksponavimas statusas T sritis radioelektronika atitikmenys: angl. electron beam exposure vok. Elektronenstrahlbelichtung, f rus. электронно лучевое экспонирование, n pranc. exposition par faisceau d électrons, f …   Radioelektronikos terminų žodynas

  • variable-shaped electron-beam exposure installation — eksponavimo įrenginys su keičiamu elektronų pluošto pavidalu statusas T sritis radioelektronika atitikmenys: angl. variable shaped electron beam exposure installation vok. Flächenstrahlbelichtungsanlage, f rus. установка электронно лучевого… …   Radioelektronikos terminų žodynas

  • ion exposure — jonpluoštis eksponavimas statusas T sritis radioelektronika atitikmenys: angl. ion exposure; ion beam exposure vok. Ionenstrahlbelichtung, f rus. ионно пучковое экспонирование, n pranc. exposition par faisceau ionique, f …   Radioelektronikos terminų žodynas

  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Ion-beam sculpting — Ion Beam scultping is a term used to describe a two step process to make solid state nanopores. The term itself was coined by Golovchenko and co workers at Harvard in the paper Ion beam sculpting at nanometer length scales [J. Li, D. Stein, C.… …   Wikipedia

  • Proximity effect (electron beam lithography) — The proximity effect in electron beam lithography (EBL) is the phenomenon that the exposure dose distribution, and hence the developed pattern, is wider than the scanned pattern, due to the interactions of the primary beam electrons with the… …   Wikipedia

  • Laser beam profiler — A laser beam profiler captures, displays, and records the spatial intensity profile of a laser beam at a particular plane transverse to the beam propagation path. Since there are many types of lasers ultraviolet, visible, infrared, continuous… …   Wikipedia

  • Ion beam — An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today s ion beam sources are typically derived from the mercury vapor thrusters… …   Wikipedia

  • Ion beam lithography — By analogy to E beam lithography, focused ion beam lithography scans an ion beam across a surface to form a pattern. The ion beam may be used for directly sputtering the surface, or may induce chemical reactions in the exposed top layer (resist) …   Wikipedia

  • Electron beam tomography — (EBT) is a specific form of computed axial tomography (CAT or CT) in which the X ray tube is not mechanically spun in order to rotate the source of X ray photons. This different design was explicitly developed to better image heart structures… …   Wikipedia

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